ScatterScope 4

Full Hemispherical Scatter Measurements

ScatterMaster LLC is proud to announce the ScatterScope™ IV scatterometer. This Patent Pending instrument is a new concept in high-speed scatter metrology. Based on operation of the Alpha unit operated in both reflection and transmission we can offer the following tentative specifications.

Hardware:

A laptop computer connected to a nineteen inch tabletop cube weighing about 25 lbs.
SS4_Photo[1]

Measurements:

Programmable scans allow sampling the reflective or transmissive hemisphere tighter than 5 deg and less than 0.6 degrees near the specular beam (with Beam Profiler option). Initial units will have a 635 nm source and later units can be delivered with programmable laser diode wavelengths such as: 473, 532, 635 and 980 nm. Dynamic range exceeding 10 orders of magnitude with a noise floor of about 10-6/sr. This makes it capable of measuring most optics, but not polished Si wafers. Any incident angle up to 75 deg from surface normal can be used. Batch scans can be programmed at different wavelengths and incident angles. Data can be displayed in either BSDF or ARS units. Full hemisphere scans are done in 5-30 seconds depending on scan resolution. The data scans shown below were taken in 15 seconds each.

ARS of Spectralon taken at an incident angle of 10 degrees.

ARS of Spectralon taken at an
incident angle of 10 degrees.

 BRDF of a 6 micro inch GAR Standard rotated nintey degrees.

BRDF of a 6 micro inch GAR Standard rotated 90 degrees.

 BRDF of a moly mirror with incident angle of 10 degrees.

BRDF of a moly mirror with incident angle of 10 degrees.

 
PDF iconDownload the ScatterScope4 Data Sheet
 

Analysis Software:

The system includes a laptop computer preloaded with the measurement and analysis software. Data is available as pictures for easy (rotatable) viewing or in digital format for analysis with MatLab, Excel, and several stray light codes. The software also allows the definition of virtual detectors in the hemisphere for easy signal and stray light analysis.

Configurations:

Systems are available in several configurations (reflective, transmissive, near specular, different wavelengths, multiple wavelengths, etc.).

Configurations for 635 nm Systems*

Base Configurations
Single Fixed Incident Angle Source – Reflective Measurements Only ……..
Single Fixed Incident Angle Source – Transmissive Measurements Only …
Programmable Incident Angle Source (Reflective and Transmissive) ………

Available Options
High Resolution Specular Beam Profiler ……………………………………………..
(Measurements down to 0.6 deg resolution near specular depending on sample.)
Different Wavelength Source ……………………………………………………………..
Multiple Wavelength Sources ……………………………………………………………..

Software: All systems include two licensed copies of the software. One loaded on the instrument control computer and an additional key to run the analysis on another computer. Free software updates included for one year.

PDF iconContact us for current pricing and availability

 

 

Scatter Course

As a supplement to your instrument a four hour course on scatter measurement and analysis given in your facility is available from John C. Stover. You will get a copy of his book, course notes (emailed ahead), a four hour presentation and four hours of consulting on your scatter measurement issues and the use of the ScatterScope4 to solve them. The cost in the USA is $5000 West of the Mississippi and $5500 East of the Mississippi. Contact us for details and international quotes.