Particle Depositions

Depositions of polystyrene latex spheres (PSL’s) are used to calibrate a variety of particle scanners in the semiconductor industry. TSW produces large PSL depositions over a PSL diameter range of about 0.1 to 50 μm.  All of them are full wafer depositions. Particle count is approximated by estimating the average distance between particles under special lighting conditions.  TSW employs a proprietary technique to reduce background contamination on PSL’s 1 μm and larger. We believe this makes them the lowest background deposition wafers available at larger PSL diameters.  We can put more than one size PSL on a wafer if needed. Prices are very competitive. Delivery times are normally less than two weeks. We use NIST Traceable PSL spheres from Duke Standards.

Prices (Effective March 1, 2014)

Depositions are available on our wafers or yours. If you send us your wafers they will be returned in your cassette. If we are buying the wafers you need to specify a cassette.  Inquire for pricing on non-silicon substrates.

Wafer Diameter Price on Your Wafer Price on TSW Wafer
300 mm First Wafer $1700 First Wafer $1835
More/Same PSL $1500 ea. More/Same PSL $1635 ea.
200 mm and smaller First Wafer $1500 First Wafer $1635
More/Same PSL $1400 ea. More/Same PSL $1535 ea.

A 10% discount will be applied to all wafers above a count of ten in a single purchase. Shipping is charged to the purchaser. Terms are Net 30 Days.

Coming Soon – Spot Deps

Spot depositions will become available in September 2014.


Initiate orders by calling John Stover at in Tucson at (520) 325-6322.  Repeat customers may email purchase orders.