MicroScan Scatterometer

Quickly monitor surface degradation with a portable handheld instrument

The MicroScan (μScan™) Scatterometer is a rugged hand held scatterometer providing a fast, non-destructive way to monitor surface roughness and optical characteristics. It can be used on mirrors, various reflectors and precision machined surfaces. It finds use in lab, field and manufacturing environments. A common use is in-place monitoring of large difficult to move surfaces (such as telescope mirrors). Another is surface finish quality control inspection of large manufactured sheet products (rolled metal, coated glass, etc) on the manufacturing floor. Results appear on an LCD screen and are saved for transmission can be transmitted.
System Description
The μScan System consists of a hand held Control Unit (CU), an interchangeable measurement head, and a separate charging unit. The CU controls all aspects of the system operation.
Operators place the measurement head on the surface to be measured and presses a button, each measurement takes less than five seconds. From a single measurement, a user can determine RMS surface roughness, Reflectance and scattered light level (BRDF) on flat or curved surfaces under any lighting conditions. The results are digitally displayed and stored in system memory. Software is available for control, analysis and file conversion.

PDF iconDownload the MicroScan Scatterometer Data Sheet


μScan® Technical Information


  • (Ra, RMS,) From 1Å up to 1100Å (.004 to 4.3 μin.)
  • (Reflectance) From 0.1 up to 100.0%
  • (BRDF) From 1e-6 to 1e0 (sr-1)

Spatial Bandwidth:

  • Upper 10 to 999 μm (selectable)
  • Lower 1.0 μm


Dimenions 1¾”h x 4½”wx9½”d
Weight 2 lbs.
Power Source:
– Type Rechargeable NiCd
– Duration > 5 hours
– Charge Time Turbo < 3 hours, trickle 15 hours
External 9 VDC to 11 VDC
Data Transfer:
Baud rate selectable to 9600, 4800, 2400, 1200, 300 bps (no parity, 8 bits, 1 stop bit)
Temperature Range:
Operations -10C to + 45C (LCD Limited)
Storage -40C to + 50C
Temperature Coefficient:
Scatter detectors ±0.1%per C
Reflectance detector ±0.15%per C
Non-Volatile Memory:
Storage capacity 700 measurements
Number of files 255
Real Time Clock
Size 4 line x 20 character LCD
Lighting LED backlit
Contrast Control Keypad controllable


PC Software – Downloads files to PC for statistical analysis of data. Provides selection of on board
process control limits. Formats data and statistics for printing. Converts data to ASCII format. Provides PC control of μScan.

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