John Stover's book, Optical Scattering: Measurement and Analysis, is in the second printing of its second edition. It is considered one of the basic texts for understanding surface scattering and the measurement of scattered light. It is published by SPIE and can be purchased by going to the following link:
John Stover teaches a four hour course on the basic of scatter metrology for SPIE. You can arrange to have a similar course taught at your facility. Unlike the SPIE course, yours can be directed towards your particular company issues. Arrangements can even be made to have the presentation include data taken on your samples.
For details and a quote: Contact TSW
An earlier version of the Tutorial is available in video form from SPIE at: